JPH01110428U - - Google Patents
Info
- Publication number
- JPH01110428U JPH01110428U JP663888U JP663888U JPH01110428U JP H01110428 U JPH01110428 U JP H01110428U JP 663888 U JP663888 U JP 663888U JP 663888 U JP663888 U JP 663888U JP H01110428 U JPH01110428 U JP H01110428U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- film forming
- board
- back plate
- cart
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 2
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP663888U JPH01110428U (en]) | 1988-01-20 | 1988-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP663888U JPH01110428U (en]) | 1988-01-20 | 1988-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01110428U true JPH01110428U (en]) | 1989-07-26 |
Family
ID=31210977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP663888U Pending JPH01110428U (en]) | 1988-01-20 | 1988-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01110428U (en]) |
-
1988
- 1988-01-20 JP JP663888U patent/JPH01110428U/ja active Pending
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